JPS60116245U - ウエハ移し換え装置 - Google Patents

ウエハ移し換え装置

Info

Publication number
JPS60116245U
JPS60116245U JP390984U JP390984U JPS60116245U JP S60116245 U JPS60116245 U JP S60116245U JP 390984 U JP390984 U JP 390984U JP 390984 U JP390984 U JP 390984U JP S60116245 U JPS60116245 U JP S60116245U
Authority
JP
Japan
Prior art keywords
wafer transfer
transfer equipment
wafer
lifting device
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP390984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220834Y2 (en]
Inventor
大賀瀬　亘
健一 木下
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP390984U priority Critical patent/JPS60116245U/ja
Publication of JPS60116245U publication Critical patent/JPS60116245U/ja
Application granted granted Critical
Publication of JPH0220834Y2 publication Critical patent/JPH0220834Y2/ja
Granted legal-status Critical Current

Links

JP390984U 1984-01-14 1984-01-14 ウエハ移し換え装置 Granted JPS60116245U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP390984U JPS60116245U (ja) 1984-01-14 1984-01-14 ウエハ移し換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP390984U JPS60116245U (ja) 1984-01-14 1984-01-14 ウエハ移し換え装置

Publications (2)

Publication Number Publication Date
JPS60116245U true JPS60116245U (ja) 1985-08-06
JPH0220834Y2 JPH0220834Y2 (en]) 1990-06-06

Family

ID=30478977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP390984U Granted JPS60116245U (ja) 1984-01-14 1984-01-14 ウエハ移し換え装置

Country Status (1)

Country Link
JP (1) JPS60116245U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート

Also Published As

Publication number Publication date
JPH0220834Y2 (en]) 1990-06-06

Similar Documents

Publication Publication Date Title
JPS60116245U (ja) ウエハ移し換え装置
JPS60111035U (ja) ウエハカウンタ
JPS6033514U (ja) パレット交換装置におけるパレットエレベ−タ−のキャリヤ−の水平保持装置
JPS58140919U (ja) 自動供給装置
JPH0646894Y2 (ja) 搬送パレット
JPS6117742U (ja) 半導体製造装置
JPS59107140U (ja) 半導体ウエ−ハ移送装置
JPS6031950U (ja) ワ−ク供給装置
JPS60143831U (ja) 足場装置
JPS602830U (ja) 半導体ウエハのエツチング槽
JPS59166962U (ja) 貼込機のデリバリ装置
JPS5926413U (ja) 搬送コンベア
JPS62150424U (en])
JPS5937233U (ja) ワ−ク搬送装置
JPS5812506U (ja) パネル搬送装置
JPS6365236U (en])
JPS59159638U (ja) 面板解載装置
JPS62103550U (en])
JPS581522U (ja) シ−ト成形用位置決め装置
JPS59115648U (ja) 半導体ウエハ移替装置
JPS587730U (ja) 微小パ−ツ整列装置
JPS59185036U (ja) シ−ト材搬送装置
JPS6039463U (ja) 電磁チヤツク
JPS59158329U (ja) 半導体ウエハ水平移し替え装置
JPS6146965U (ja) シ−トの分割、移送装置